By Riccardo d'Agostino, Pietro Favia, Yoshinobu Kawai, Hideo Ikegami, Noriyoshi Sato, Farzaneh Arefi-Khonsari
ISBN-10: 3527405917
ISBN-13: 9783527405916
ISBN-10: 3527622195
ISBN-13: 9783527622191
A panel of the world over well known scientists talk about the newest ends up in plasma know-how. This quantity has been compiled with either a didactic method and an outline of the latest achievements for business purposes. it truly is divided into major sections. One is concentrated on basic expertise, together with plasma creation and keep watch over, high-pressure discharges, modeling and simulation, diagnostics, airborne dirt and dust keep an eye on, and etching. The part on program know-how covers polymer remedies, silicon sun mobile, coating and spray, biomaterials, sterilization and waste remedy, plasma propulsion, plasma exhibit panels, and anti-corrosion coatings. the result's an integral paintings for physicists, chemists and engineers concerned about the sphere of plasma know-how.
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Example text
I. J. (1997) Plasma Sources Sci. , 6, R1. 15 Holstein, T. (1952) Phys. , 88, 1427. B. M. (1994) Plasma Sources Sci. , 3, 169. A. B. (1997) J. Appl. , 82, 5944. B. M. (1998) Phys. Rev. , 80 (15), 3264. M. and Smolyakov, A. (2001) Plasma Sources Sci. , 10, 459. W. (1990) J. Phys. D: Appl. , 23, 293–298. A. M. (1992) Plasma Sources Sci. , 1, 179–186. M. R. (1998) Plasma Sources Sci. , 7, 179–185. 23 Hopwood, J. (1994) Plasma Sources Sci. , 3, 460. A. (1995) J. Res. Natl Inst. Stand. , 100, 341. A.
The plasma produced by the plasma source is supplied into two regions of a vacuum chamber, as illustrated in Fig. 13. The each region has the wall with different electric potential. In Fig. 13, a short metal cylinder is set in the cylindrical vacuum chamber. 3 Dust Collection and Removal Fig. 13 Schematic for method of ion-energy control. , a plasma (I) in the cylinder and a plasma (II) in the region between the cylinder and the vacuum chamber. Under this configuration, an ion beam is supplied from the plasma (I) into the plasma passed through the grid from the region (II).
The solution we have implemented was to arrange a segmented electrostatic shield within the plasma chamber. The electrically conductive film will deposit on this shield and no longer on the dielectric chamber wall. The shield was made of aluminum and is composed of seven slits perpendicular to the coil current to prevent the induced currents from forming a loop in the entire shield periphery (Fig. 7). In that manner, the induced current created within each sector of the shield induces itself currents in the plasma.
Advanced Plasma Technology by Riccardo d'Agostino, Pietro Favia, Yoshinobu Kawai, Hideo Ikegami, Noriyoshi Sato, Farzaneh Arefi-Khonsari
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